Research on a compact and high sensitivity gas pressure sensor based on fiber Fabry-P?rot and Bragg grating*

Abstract:

A compact and highly sensitive gas pressure and temperature sensor based on Fabry-P?rot interferometer(FPI) and fiber Bragg grating (FBG) is proposed and demonstrated experimentally in this letter. The theoretical model for pressure and temperature sensing is established to underpin the design. Building on this foundation, a novel micro silicon cavity sensor structure sensitive to pressure is devised downstream of the FBG. The concept of separate measurement and the mechanisms enhancing pressure sensitivity are meticulously analyzed, leading to the fabrication of corresponding samples. The sensor offers the advantages of compact size, robust construction, easy fabrication, and high sensitivity, making it potentially valuable for micro-pressure application.

Key words:Fabry-P?rot;temperature;sensitivity;gas pressure