A reconstruction method of AFM tip by using 2 μm lattice sample
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Hebei Semiconductor Research Institute, Shijiazhuang 050051, China

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    Abstract:

    As an ultra-precise instrument to characterize nano-morphology and structure, the morphology of atomic force microscopy (AFM) tip directly affects the quality of the scanned images, which in turn affects the measurement accuracy. In order to accurately characterize three-dimensional information of AFM tip, a reconstruction method of AFM tip using 2 μm lattice sample is researched. Under normal circumstances, an array of micro-nano structures is used to reconstruct the morphology of AFM tip. Therefore, the 2 μm lattice sample was developed based on semiconductor technology as a characterization tool for tip reconstruction. The experimental results show that the 2 μm lattice sample has good uniformity and consistency, and can be applied to the tip reconstruction method. In addition, the reconstruction method can accurately obtain the morphology of AFM tip, effectively eliminate the influence of the "probe effect" on the measurement results, and improve measurement accuracy.

    Reference
    [1] HAN G, LI H, ZOU Y. Image reconstruction method of grating atomic force microscope based on blind reconstruction of tip:CN110749751A[P]. 2020-02-04.
    [2] WU T, LV L, ZOU Y, et al. Image reconstruction of TGZ3 grating by eliminating tip-sample convolution effect in AFM[J]. Micro & nano letters, 2020, 15(15) :1167-1172.
    [3] HAN G, WU T, LV L, et al. Super-resolution AFM imaging based on enhanced convolutional neural network[J]. Nano, 2021, 16(12):2150147.
    [4] YUAN S, DONG Z, MIAO L, et al. Research on the reconstruction of fast and accurate AFM probe model[J]. Chinese science bulletin, 2010, (24):5.
    [5] HAN G, CAO S, WANG X, et al. Blind evaluation of AFM tip shape by using optical glass surface with irregular nanostructures as a tip characterizer[J]. Micro & nano letters, 2017, 12(12):916-919.
    [6] ZHANG X, LI S, HAN Z, et al. Effect analysis of surface metal layer on step height standard[J]. Modern physics letters B, 2021:2140006.
    [7] WU Z, CAI Y, WANG X, et al. Amorphous Si critical dimension structures with direct Si lattice calibration[J]. Chinese physics B, 2019, 28(3):030601.
    [8] ZHAO L, ZHANG X, LI S, et al. Discussion on calibration method of scanning electron microscope based on line spacing standard samples[J]. Computer and digital engineering, 2021, 49(04):644-648.
    [9] ZHANG X, LI S, HAN Z, et al. A lattice measuring method based on integral imaging technology[J]. Optoelectronics letters, 2021, 17(5):313-316.
    [10] XU L, GUO Q, QIAN S, et al. Self-adaptive grinding for blind tip reconstruction of AFM diamond probe[J]. Nanotechnology and precision engineering, 2018, (2):150-155.
    [11] TEIMOURI M. Blind reconstruction of punctured convolutional codes[J]. Physical communication, 2021, 47:101297.
    [12] HAN Z, LI S, FENG Y, et al. Design and preparation of nanoscale linewidth standard samples[J]. Computer and digital engineering, 2021, 49(4):5.
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ZHANG Xiaodong, ZHAO Lin, HAN Zhiguo, XU Xiaoqing, LI Suoyin, WU Aihua. A reconstruction method of AFM tip by using 2 μm lattice sample[J]. Optoelectronics Letters,2022,18(7):440-443

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History
  • Received:January 19,2022
  • Revised:March 25,2022
  • Online: September 09,2022
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