Fabrication of sapphire rib waveguides using a femtosecond laser
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1. School of Mechanical Engineering, Hubei University of Technology, Wuhan 430068, China

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    Abstract:

    We demonstrate a method for fabricating sapphire rib waveguides with femtosecond laser micromachining technology. Finite difference beam propagation method (FD-BPM) is applied to design sapphire rib waveguides. We explore the process of etching on a sapphire substrate surface via direct laser ablation. Rib waveguides that satisfies the dimensions of our design were fabricated. Actual light propagation performance is tested, and with the cut-back method, the insertion loss of 2.9±0.5 dB/cm is measured.

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WANG Jue, TAOQing, HU Chen, ZHAI Zhong-sheng, CHENG Jian, LIU Dun. Fabrication of sapphire rib waveguides using a femtosecond laser[J]. Optoelectronics Letters,2019,15(3):190-194

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History
  • Received:November 21,2019
  • Online: May 01,2020
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