Archive > Volume 15 Issue 3 > 2019,15(3):190-194. DOI:https://doi.org/10.1007/s11801-019-8180-8 CSTR:[cstr] Prev Next
Fabrication of sapphire rib waveguides using a femtosecond laser
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Abstract:
We demonstrate a method for fabricating sapphire rib waveguides with femtosecond laser micromachining technology. Finite difference beam propagation method (FD-BPM) is applied to design sapphire rib waveguides. We explore the process of etching on a sapphire substrate surface via direct laser ablation. Rib waveguides that satisfies the dimensions of our design were fabricated. Actual light propagation performance is tested, and with the cut-back method, the insertion loss of 2.9±0.5 dB/cm is measured.
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