Archive > Volume 15 Issue 1 > 2019,15(1):1-5. DOI:https://doi.org/10.1007/s11801-019-8107-4 CSTR:[cstr] Prev Next
A slot microring sensor with feedback spiral waveguide for trace gas CH4 sensing in mid-infrared region
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Abstract:
In this paper, a slot microring resonator with a piece of spiral feedback waveguide for CH4 sensing application is proposed. This sensor is based on silicon-on-insulator (SOI) substrate and with the operation wavelength in mid-infrared region. To reach high sensitivity and good selectivity, slot cross section and spiral feedback waveguide are carefully tailored. The sensor shows ppb-scale trace gas sensing potential and is easy to be packaged in integrated photonics circuits. Calculation results show that the sensitivity reaches 1.4×10-2 dB/ppm and the detection limit achieves 700 ppb in the case of Lspiral=100Lr.
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