Home > Archive>Volume 13, Issue 3, 2017 >161-164. DOI:10.1007/s11801-017-7051-4
PDF HTML XML Export Cite reminder
A 45-channel 100 GHz AWG based on Si nanowire waveguides
CSTR:
[cstr]
Author:
Affiliation:

1. State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Bei-;jing 100083,China;2. College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing;100083, China

  • Article
    • | |
  • Metrics
    • |
  • Reference [20]
    • |
  • Related [20]
    • | | |
  • Comments
    Abstract:

    A 45-channel 100 GHz arrayed waveguide grating (AWG) based on Si nanowire waveguides is designed, simulated and fabricated. Transfer function method is used in the spectrum simulation. The simulated results show that the central wavelength and channel spacing are 1 562.1 nm and 0.8 nm, respectively, which are in accord with the designed values, and the crosstalk is about −23 dB. The device is fabricated on silicon-on-insulator (SOI) substrate by deep ultraviolet lithography (DUV) and inductively coupled plasma (ICP) etching technologies. The 45-channel 100 GHz AWG exhibits insertion loss of 6.5 dB and crosstalk of −8 dB. This work has been supported by the National High Technology Research and Development Program of China (No.2015AA016902), and the National Natural Science Foundation of China (Nos.61435013 and 61405188). E-mail:zhangjiashun@semi.ac.cn

    Reference
    [1] Wang J, Sheng Z and Li L, Optics Express 22, 9395 (2014).
    [2] Kim D J, Lee J M and Song J H, IEEE Photonics Technology Letters 20, 1615 (2008).
    [3] Ye T, Fu Y and Qiao L, Optics Express 22, 31899 (2014).
    [4] Pan P, An J and Zhang J, Optics Communications 355, 376 (2015).
    [5] Dai Hong-qing, An Jun-ming and Wang Yue, Journal of Semiconductors 35, 104010 (2014).
    [6] Li Jian, An Jun-ming, Xia Jun-lei, Wang Hong-jie and Hu Xiong-wei, Optoelectronics Letters 1, 131 (2005).
    [7] Orghici R, Bethmann K and Zywietz U, Optics Letters 41, 3940 (2016).
    [8] Xiaolong Li, Liuhong Ma, Yuanfei Ai and Weihua Han, Journal of Semiconductors 38, 024005 (2017).
    [9] Song Wei and Xie Kang, Optoelectronics Letters 4,92 (2008).
    [10] Cheng Zhiqun, Yan Guoguo, Ni Wayne, Zhu Dandan, Ni Hannah, Li Jin, Chen Shuai and Liu Guohua, Journal of Semiconductors 37, 055007 (2016).
    [11] Bogaerts W, Selvaraja S K and Dumon P, IEEE Journal of Selected Topics in Quantum Electronics 16, 33 (2010).
    [12] Yuan Pei, Wu Yuanda, Wang Yue, An Junming and Hu Xiongwei, Journal of Semiconductors 36, 084005
    (2015).
    [13] Fang Q, Song J and Zhang G, IEEE Photonics Technology Letters 21, 319 (2009).
    [14] Wu Weikang, An Xia, Tan Fei, Feng Hui, Chen Yehua, Liu Jingjing, Zhang Xing and Huang Ru, Journal of Semiconductors 36, 114004 (2015).
    [15] Fang Q, Liow T Y and Song J F, Optics Express 18, 5106 (2010).
    [16] Pathak S, Vanslembrouck M and Dumon P, IEEE Photonics Technology Letters 26, 718 (2014).
    [17] Fang Q, Li F and Liu Y, Optics Communications 258, 155 (2006).
    [18] Pathak S, Vanslembrouck M and Dumon P, Optics Express 20, B493 (2012).
    [19] Kim D J, Lee J M and Song J H, IEEE Photonics Technology Letters 20, 1615 (2008).
    Cited by
    Comments
    Comments
    分享到微博
    Submit
Get Citation

LI Kai-li, ZHANG Jia-shun, AN Jun-ming, LI Jian-guang, WANG Liang-liang, WANG Yue, WU Yuan-da, YIN Xiao-jie, HU Xiong-wei. A 45-channel 100 GHz AWG based on Si nanowire waveguides[J]. Optoelectronics Letters,2017,13(3):161-164

Copy
Share
Article Metrics
  • Abstract:3816
  • PDF: 0
  • HTML: 0
  • Cited by: 0
History
  • Received:March 06,2017
  • Online: September 29,2017
Article QR Code
Phone：86-22-60214471
URL：http://www.oelett.com E-mail：oel@263.net
Supported by:Beijing E-Tiller Technology Development Co., Ltd.
® 2025 All Rights Reserved