Archive > Volume 11 Issue 3 > 2015,11(3):203-206. DOI:10.1007/s11801-015-4231-y CSTR:[cstr] Prev Next
Sub-micrometer-thick and low-loss Ge20Sb15Se65 rib waveguides for nonlinear optical devices
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Abstract:
We report the fabrication and optical properties of sub-micrometer-thick Ge20Sb15Se65 chalcogenide rib waveguides. The radio-frequency (RF) magnetron sputtering method is used to deposit 0.83 μm-thick films. A protective layer of SU-8 is employed to prevent the attack of the alkaline developer, and CHF3 is used as the etching plasma for reactive ion etching (RIE). Finally, the resulted rib waveguides with smooth sidewalls and vertical pattern profiles are rendered. The propagation losses for 4 μm-wide waveguides are measured to be 0.7 dB/cm for transverse electric (TE) modes and 0.68 dB/cm for transverse magnetic (TM) modes at 1 550 nm via the cutback method.
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This work has been supported by the National Natural Science Foundation of China (No.61377061), the Public Project of Zhejiang Province (No.2014C31146), the Young Leaders of the Academic Climbing Project of the Education Department of Zhejiang Province (No.pd2013092), the Natural Science Foundation of Ningbo City (No.2014A610124), the Open Research Fund of the Most Important Specialty “Information and Communication Engineering” of Zhejiang Province (No.XKXL1321), and the Magna Fund sponsored by K. C. Wong in Ningbo University of China.
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