Fabrication of optical fiber sensor based on double-layer SU-8 diaphragm and the partial discharge detection

Abstract:

In this paper, a partial discharge detection system is proposed using an optical fiber Fabry-Perot (FP) interferometric sensor, which is fabricated by photolithography. SU-8 photoresist is employed due to its low Young’s modulus and potentially high sensitivity for ultrasound detection. The FP cavity is formed by coating the fiber end face with two layers of SU-8 so that the cavity can be controlled by the thickness of the middle layer of SU-8. Static pressure measurement experiments are done to estimate the sensing performance. The results show that the SU-8 based sensor has a sensitivity of 154.8 nm/kPa, which is much higher than that of silica based sensor under the same condition. Moreover, the sensor is demonstrated successfully to detect ultrasound from electrode discharge.