High damage threshold HfO2/SiO2 multilayer mirrors deposited by novel remote plasma sputtering
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Abstract:
Sputtering deposition coatings offer significant advantages on electron beam (EB) deposition, including high packing density, environmental stability and extremely low losses. But the inherent high compressive stress affects its application in high power laser system. This paper describes the technical feasibility of high damage threshold laser mirrors deposited by a novel remote plasma sputtering technique. This technique is based on generating intensive plasma remotely from the target and then...
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Clc Number:
O53;O484.1
