HE Bao-hua
Key Laboratory of Materials Physics,Education Ministry of China,College of Physics and Engineering,Zhengzhou University;YANG Shi-e
Key Laboratory of Materials Physics,Education Ministry of China,College of Physics and Engineering,Zhengzhou University;CHEN Yong-sheng
Key Laboratory of Materials Physics,Education Ministry of China,College of Physics and Engineering,Zhengzhou University;LU Jing-xiao
Key Laboratory of Materials Physics,Education Ministry of China,College of Physics and Engineering,Zhengzhou University;O484.1
HE Bao-hua, YANG Shi-e, CHEN Yong-sheng, LU Jing-xiao. Simulation of gas phase reactions for microcrystalline silicon films fabricated by PECVD[J]. Optoelectronics Letters,2011,7(3):198-201
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