Investigation of luminescence from SiC nano-granule films on porous glass substrate

Abstract:

SiC granule films were fabricated onto porous glass substrate by RF-magnctron sputtering. Photoluminescence(PL) mea-surements show that there are light emissions at three different wavelengths. Ultraviolet emission peaked at 360 nm origi-nated from the band-band transmission of SiC nanoparticles with relatively small size. The 370 nm light emission was dueto the luminescence of the nano-skeletons of porous glass that was formed during the etching of the glass substrate. Theblue emission at about 460 nm was associated with the recombination of the excited electron and O-deficient defectsappeared at the interface between SiC nanoparticles and the porous glass. Furthermore, the optimal PL performance wasobtained when SiC deposited time was 1 h and the glass substrate was etched for 20 min in the annealing sample (450℃).