Abstract:Today,micro-system technology and the development of new MEMS(Micro-Eleetro-Mechanical Systems)ate emerging rapidly.In order for this development to become a SUCCESS in the long run,measurement systems have to ensure product quality.Most often,MEMS have to be tested by means of functionality or destructive tests.One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities.We present a measurement system that could be used for these kinds of measurements.The system combines a fiber optical,miniaturized sensing probe with low-coherence intcrferometry,so that absolute distance measurements with nanometcr accuracy are possible.