Digital holography and its application for microsystems inspection
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Author:
- Werner Jüptner, Christoph von Kopylow and Claas Falldorf
Werner Jüptner, Christoph von Kopylow and Claas Falldorf
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Clc Number:
TP391.4
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Abstract:
A large number of applications in the before mentioned sense is reported in the literature. In this paper a special remark will be given to the application of 3D deformation measurements using only one illumination direction for the recording of the two holograms in the reference and the loaded state, and only one observation direction for the reconstruction.
Key words:O438.1
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Werner Jüptner, Christoph von Kopylow, Claas Falldorf. Digital holography and its application for microsystems inspection[J]. Optoelectronics Letters,2008,4(1):72-77
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History
- Received:August 21,2007
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