All-solid-state microscopic interferometer with frequency-variation and phase-shifting capability
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TH744.3

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    Abstract:

    A novel microscopic interferometry with ability of frequency-variation and phase-shifting is proposed for microstructures testing. By using acousto-optic technique, sequential carriers can be generated with different spatial frequencies so that the temporal phase unwrapping method can be applied for decoding the height information. Combined with phase-shifting technique realized by spatial light modulator, this method is especially suitable for interferometric measurement with high precision and large dynamic range.

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Jin-dong Tian, Xiao-bo Zhao, Xiang Peng. All-solid-state microscopic interferometer with frequency-variation and phase-shifting capability[J]. Optoelectronics Letters,2007,3(2):123-125

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  • Received:January 09,2007
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