Micro-optical structures formed by a mask moving method
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Abstract:
An unique mask moving method is developed for forming effective micro-optical structures with continuous profile. The mechanism for forming different micro-optical profiles is disclosed, and the designed approach for binary moving mask is described. Finally some concrete micro-optical components with typical microstructures are presented for demonstrating the validity of the method.
Chun-lei Du, Xiao-chun Dong, Qi-ling Deng, Xian-gang Luo. Micro-optical structures formed by a mask moving method[J]. Optoelectronics Letters,2007,3(2):95-98