Design and fabrication of ultrasmall arrayed waveguide grating multiplexers based on Si nanowire waveguides
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- Dao-xin Dai, Liu Liu, Sheng Zhen,Sai-ling He
Dao-xin Dai, Liu Liu, Sheng Zhen,Sai-ling He
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TN491
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Abstract:
The large refractive index difference between Si and SiO2 makes it possible to realize ultrasmall photonic integrated circuits. A 5×5 ultracompact arrayed waveguide grating multiplexer based on 500×250 nm Si nanowire waveguides is designed and fabricated by using the technologies of E-beam writing and amorphous-Si deposition. The measured channel spacing is about 1.5 nm (close to the design value) and the channel crosstalk is about -8 dB.
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Dao-xin Dai, Liu Liu, Sheng Zhen, Sai-ling He. Design and fabrication of ultrasmall arrayed waveguide grating multiplexers based on Si nanowire waveguides[J]. Optoelectronics Letters,2007,3(1):7-9
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- Received:September 20,2006
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