Phosphosilicate glass film for optical waveguide by sol-gel method
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Abstract:
In this paper, silica-on-silicon erbium-doped phosphosilicate glass film material was fabricated for optical waveguides by sol-gel method. Samples were characterized and analyzed. It is demonstrated that we have got well-distributed, good translucent, alterable thickness of film and glass state erbiumdoped phosphosilicate films material for optical waveguides by sol-gel method.